Semiconductor Tool and Tester Manufacturers Questionnaire

If you would like to complete this survey over the phone,
please call:(630) 305-1113, or (630) 305-1031 M-W 9-12, 1-5 CDT

NOTE: If you manufacture more than one kind of tool or tester,
please complete this form for each main category of tool or tester.

 1.

Describe the main function of the tool or tester in your fab.


 2.

What processes occur in the tool or tester that generates heat removed by Process Cooling Water (PCW)?


 3.

Is there another loop of water in the tool or tester itself? (This loop is usually small (5-20 gallons) and is isolated from the fab's "house" PCW.)

YES    NO
If YES, what do you call it?


 4.

What are the consequences of the PCW not performing this function (including financial, safety, and production impacts)? What is the average cost/hour of downtime for one of these tools or testers?


 5.

Is there a PCW quality spec? If you answered YES to Question 3, does this loop have an additional spec?

YES    NO
If YES, what is the spec?
If NO, click here to skip to Question 8


 6.

What is the reason for this spec? What drives it? (Check as many as apply)

Prevent electrical current leakage
Scale prevention
Corrosion inhibition
Spec was always like this
Other (please briefly explain):


 7.

What are the common water-contacted metallurgies within the tool or tester? What are the reasons for each? (check as many as apply)

Aluminum (Reason for use:)
Stainless Steel (Reason for use: )
Copper (Reason for use: )
Mild Steel (Reason for use:)
Other (Reason for use:)


 8.

Are there any mechanical treatment systems applied to (or recommended for) the water in the process cooling loop?

YES    NO
If YES, please specify.
Bag filters Cartridge filters Ion exchange
Other (please describe)


 9.

Is there a requirement for the tool or tester to be isolated from the fab's main PCW loop?

YES    NO
If YES, why? How is the isolation achieved?


10.

What are the temperature limits (upper and lower) for the loop of water in the tool or tester?


11.

Are there any guidelines for monitoring the condition of the PCW as it flows through your company's tools or testers?
YES   NO
Is there a recommended frequency of maintenance for the water loop?
YES   NO
If YES, please indicate below.

 
pH
Conductivity
Water Hardness
Chemical Level
Microbio
Daily
Weekly
Quarterly
Semi-Annual
Annual
On Start Up


12.

In your experience, what is the average failure rate or MTBF for this category of tool or tester in your company?

1-6 months 7-12 months 1-1.5 years
1.5-2 years 2-3 years 3-5 years
Other


13.

In your experience, what is the average failure rate or MTBF for this category of tool or tester in the industry?

1-6 months 7-12 months 1-1.5 years
1.5-2 years 2-3 years 3-5 years
Other


14.

What suggestions would you have for a company that provides services for PCW loops in a fab?



15.

Do you provide recommendations for water treatment products or suppliers of water treatment products?

YES    NO
If YES, please describe the process.



16.

Would there be a benefit to remote web-based temperature and heat exchange efficiency tracking to reduce chance for downtime due to water related issues?

YES    NO
If YES, please describe the benefit.



17.

For the purposes of training our people, would it be possible to obtain non-proprietary photos of the cooling systems in some of your more popular tools or testers? (If a secrecy agreement is required, we would be happy to comply.)

YES   NO

 

Thank you for participating in this survey. We would like to offer you a copy of the book "The Nalco Guide to Cooling Water Failure Analysis." Please fill out the area below so that we can mail it to you.

Note: the following fields are required

* NAME

* TITLE

* ADDRESS

* CITY

* STATE

   * ZIP CODE

* E-MAIL

   
 

If we have any further questions regarding this survey, may we contact you?
YES   NO